Method of manufacturing NAND type EEPROM

ABSTRACT

The present invention relates to a non-volatile semiconductor memory having non-volatile memory cells capable of electrically erasing and writing data. Each memory cell has a floating gate formed on the surface of the semiconductor substrate above the channel region, and a control gate. The floating gate partially covers the channel region. Each memory cell is thereby constructed of a parallel connection of a floating gate transistor and an enhancement type transistor. The floating gate transistor is displaced in one of the widthwise directions of the channel region, or partially covers only the central portion of the channel region in the widthwise direction thereof. A plurality of memory cells are connected in series to constitute a basic block. Adjacent basic blocks are separated by an enhancement type MOS transistor. In this memory, a memory cell (floating gate) and an enhancement type MOS transistor (gate) are formed in self alignment with each other using the same mask. In addition, in this memory, a control gate and a floating gate are formed in self alignment with each other using the same mask.

This application is a divisional application of application Ser. No. 07/499,342, filed Jun. 21, 1990 now U.S. Pat. No. 5,323,039.

TECHNICAL FIELD

The present invention relates to a non-volatile semiconductor memory having non-volatile memory cells capable of electrically erasing and writing data.

BACKGROUND ART

A ROM, the storage contents of memory cells of which can be electrically erased and changed, is known as an EEPROM (electrically erasable programmable ROM). When compared with an EPROM, EEPROM can be used more easily since data are erased with electric signals while being mounted on a circuit board, so that demands for use with various control circuits, memory cards or the like are rapidly increasing. A large scale EEPROM in particular which is used when changing data in a floppy disk has been recently desired.

FIGS. 1A to 1C show the structure of the memory array of a conventional NAND type EEPROM suitable for large scale integration. FIG. 1A is a plane view of the pattern, FIG. 1B is a cross section along line A--A' of FIG. 1A, and FIG. 1C is a cross section along line B--B' of FIG. 1A. Referring to FIG. 1A, a portion enclosed by a broken line and indicated at 10 represents one NAND basic block. As understood from FIG. 1B, this NAND basic block 10 is partitioned from other NAND basic blocks disposed in the right/left direction as viewed in FIG. 1B by field oxide films 12, 12, . . . The vertical cross section of the NAND basic block 10 is as shown in FIG. 1C. Specifically, referring to FIG. 1C in particular, reference numeral 11 represents a p-type silicon semiconductor substrate, 13 a common source region made of an n⁺ diffusion layer and shared by respective basic blocks 10, 14 a drain region of the NAND basic block 10 which region is also made of an n⁺ diffusion layer, 15, 15, . . . source/drain regions of memory cells within the NAND basic block 10 which regions are made of n⁺ diffusion layers, 16, 16, . . . floating gates made of a first polysilicon layer, 17, 17, . . . control gates made of a second polysilicon layer, 18 a first select gate constructed by electrically connecting together the first and second polysilicon layers, 19 a second select gate constructed by electrically connecting together the first and second polysilicon layers, 20 a data line, 21 a contact connecting the drain region 14 and the data line 20, 22 a gate oxide film formed between the floating gate 16 and the substrate 11 and having a thickness of, e.g., about 100 Å, 23 a gate insulating film formed between the floating gate 16 and the control gate 17 for which the film has a thickness of about 300 Å and a three-layered structure of, e.g., ONO (oxide-nitride-oxide), 24 an insulating oxide film, and 25 and 26 gate oxide films formed between the substrate 11 and the first and second select gates 18 and 19, respectively, and having a thickness of, e.g., about 400 Å. This gate oxide film 25 may be of the ONO three-layered structure which is formed at the time of forming the gate oxide film 23. In this case, the select gate transistors 18 and 19 are made of only the second polysilicon layer without using the first polysilicon layer. As seen from FIG. 1C in particular, each NAND basic block 10 is formed with ten transistors (memory cells and select gate transistors) 31 to 40 which will be described later in detail. The transistors 31 to 40 are turned on and off by means of gates 17 to 19 of respective channels. The on/off of the transistors 32 to 39, however, is controlled in dependence upon whether each floating gate 16 has electrons or holes.

Each floating gate 16 stores "1" or "0" in dependence on whether it has electrons or holes.

The number of control gates 17, 17, . . . provided for each NAND basic block 10 is, for example, eight. Each control gate is formed continuously to cover a plurality of floating gates 16, 16, . . . positioned under the control gate. Namely, as seen from FIGS. 1A and 1B in particular, the width (width in the up/down direction as viewed in FIG. 1A) of each floating gate 16, 16, . . . is the same as that of each control gate 17, 17, . . . , and the length (length in the right/left direction as viewed in FIG. 1A) of each floating gate 16, 16, . . . is formed shorter than the width of each NAND basic block. The memory cell array is constructed by disposing the NAND basic blocks 10 in matrix in the up/down right/left directions as viewed in FIG. 1A.

The equivalent circuit of the NAND basic block 10 is shown in FIG. 2. In FIG. 2, two NAND basic blocks 10 and 10 disposed right and left are shown. As seen from FIG. 2, the equivalent circuit of each NAND basic block 10 is constructed such that between the source 13 and the data line 20 (DL1, DL2), the select gate transistor 31, eight memory cells 32 to 39, and select gate transistor 40 are serially connected. The transistors 31 and 40 are inputted with select gate signals SG1 and SG2, respectively, and word lines WL1 to WL8 are connected to the control gates 17 of the memory cells 32 to 39.

The data erase/write operation of eight memory cells 32 to 39 each made of a floating gate transistor will be described hereinbelow.

As understood from FIG. 3A, data are erased by applying a high voltage, e.g., 15V to the control gate 17 and connecting the source 15 and drain 15 to a 0V ground potential. By applying a high voltage to the control gate 17, the control gate 17 and the floating gate 16 are electrostatically coupled so that the potential of the floating gate 16 rises and electrons are injected from the source 15 or drain 15 into the floating gate 16 via the gate oxide film 22. This is called an erase state, and the stored data at this state is defined as a "1" level. The threshold voltage of the memory cell at this state becomes about 2 to 3V as shown in the characteristic curves of FIG. 4.

As understood from FIG. 3B, data are written by setting the control gate 17 at 0V, making the source 15 in an open state, and applying a high voltage to the drain 15. In this case, electrons are emitted to the drain 15 from the floating gate 16, and the threshold voltage of the memory cell becomes about -5V as shown in the characteristic curves of FIG. 4. The stored data at this state are defined as a "0" level.

The operation of the NAND basic block 10 show in FIGS. 2 and 1A will be described with reference to Table 1.

                                      TABLE 1     __________________________________________________________________________             ORDER OF WRITING DATA             CELL 1                  CELL 2                       CELL 3                            CELL 4                                 CELL 5                                      CELL 6                                           CELL 7                                                CELL 8                                                     READ     ERASE   (32) (33) (34) (35) (36) (37) (38) (39) (EXAMPLE)     __________________________________________________________________________     SG2        15 V 20 V 20 V 20 V 20 V 20 V 20 V 20 V 20 V 5 V     WL8        15   20   20   20   20   20   20   20   0    5     WL7        15   20   20   20   20   20   20   0    0    5     WL6        15   20   20   20   20   0    0    0    0    5     WL5        15   20   20   20   20   0    0    0    0    5     WL4        15   20   20   20    0   0    0    0    0    5     WL3        15   20   20    0    0   0    0    0    0    5     WL2        15   20    0    0    0   0    0    0    0    5     WL1        15    0    0    0    0   0    0    0    0    0     SG1         5    0    0    0    0   0    0    0    0    5     DL1         0   20   20   20   20   20   20   20   20   1     DL2         0   10   10   10   10   10   10   10   10   0     __________________________________________________________________________

Data are erased by setting the data line DL1, DL2 to 0V, SG1 to 5V, SG2 to 15V, and word lines WL1 to WL8 to 15V. In this state, all the drains and sources of the memory cells 32 to 39 become 0V so that all the data in the memory cells 32 to 39 are erased collectively.

Data are written sequentially and selectively starting from the memory cell 32 (cell 1) nearest to the select gate transistor 31. First, in order to write data in the cell 32, SG1 is set to 0V, data line DL1 to 20V, DL2 to 10V, and SG2 to 20V. Next, word line WL1 is set to 0V, and all the other word lines WL2 to WL8 to 20V so that the memory cell 32 is selected and data are written therein. The threshold voltage of the memory cell whose data have been erased is about 3V, whereas that of the memory cells 33 to 39 (cell 2 to cell 8) with a high voltage being applied in a write state is about 5V while taking the substrate effect into consideration. As a result, the drain of the memory cell 32 is applied with (gate voltage of the memory cell 33)--(threshold voltage of the erased memory cell)=(20V -5V)=15V, so that electrons are emitted from the floating gate to the drain via the gate oxide film (indicated at 22 in FIG. 1B) having a thickness of 100 Å, in other words, data are written in the memory cell 32.

In writing data in the next memory cell 33, word Lines WL1 and WL2 are set to 0V, and all the other word lines WL3 to WL8 are set to 20V. In a similar manner, data writing is sequentially performed up to the memory cell 39 with voltages being set as shown in Table 1.

If data are not written in a selected memory cell, i.e., if the "1" level data are remained unchanged, data line DL1 is applied with 0V or 10V instead of 20V. In this case, a voltage is not applied between the floating gate and the drain, or an applied voltage is small, so that data are not written.

As described above, data writing is sequentially performed for eight memory cells starting from the memory cell 32 on the source side. The reason for this is that if data are written into a cell without using this data writing order, a high voltage (20V) is applied to the word lines of the other cells already written, and 0V is applied to the drain, to thereby produce an erase state and erase the data in the other cells. By using the above-described data writing order, it is possible to prevent the written data from being erased.

Furthermore, while a data erase/write operation is carried out for the block 10 on the data line DL1 side, the other data line DL2 is applied with about 10V which is an intermediate voltage between the write and erase operations. This is carried out for preventing erroneous data erase/write relative to the memory cells connected to the data line DL2.

Furthermore, while one NAND basic block is selected and data are written, in the other NAND basic blocks connected to the block vertically (in the up/down direction as viewed in FIG. 1A), SG2 is set to 0V and the word lines WL1 to WL8 are set to 0V so as to prevent erroneous data erase/write.

The data read operation from the NAND basic block is carried out in the following manner. For example, in FIG. 2, consider the case wherein data are read by selecting the memory cell 32 in the NAND basic block connected to the data lines DL1. In this case, as shown in Table 1, DL1 is set to 1V, SG1 and SG2 to 5V, the selected word line WL1 to 0V, and the other word lines WL2 to WL8 to 5V. The non-selected data line DL2 becomes a floating state, and takes approximately 0V. If the stored data in the selected memory cell 32 are of the "1" level (threshold voltage of +3V), the control gate voltage is 0V so that it takes an off-state. As a result, in the selected NAND basic block 10, current will not flow between the data line DL1 and the ground potential so that the "1" level data are sensed with a sense amplifier (not shown) connected to the data line DL1. On the other hand, if the stored data in the selected memory cell 32 is of "0" level (threshold voltage of -5V), the memory cell 32 takes an on-state even if the control gate voltage is 0V. In this case, the control gate voltages of the other memory cells 33 to 39 are 5V and these memory cells 33 to 39 take an on-state irrespective of the stored data. Therefore, in this basic block, current flows between the data line DL1 and the ground potential so that the "0" level data are sensed with the sense amplifier.

In a conventional memory having NAND basic blocks described above, memory cells can be disposed at the pitch of the word lines (control gates 17), and only a single contact 21 is used for a plurality (e.g., eight) of memory cells, allowing a larger number of memory cells per unit area and providing a structure suitable for miniaturizing a large capacity memory. A conventional memory, however, has the following problems.

A first problem is as follows. Since a NAND basic block has a HAND type cell structure with a plurality of memory cells connected in series, it is necessary for reading data from a selected memory cell to turn on other non-selected and erased memory cells. It becomes necessary to therefore turn them on by using a 5V gate voltage and to maintain the threshold voltage smaller than or equal to about 3V (at least smaller than or equal to 5V). Similarly, it is also necessary to maintain the threshold voltage of the selected and erased memory cell larger than or equal to about 1V (at least larger than or equal to 0V). It is difficult however, to uniformly erase all memory cells of a large capacity memory of large scale such as 1M bits or 4M bits as variation will necessarily occur. If such variation causes the threshold voltage of even one erased memory cell to move out of the range from 0V to 3V, then the memory becomes a defective one. It is very difficult to design and manufacture a memory capable of uniformly and reliably erase the data of all memory cells.

Apart from the above, in order to speed up the data read speed, it is necessary to make a larger current flow in a NAND basic block which includes a memory cell storing "0" level data. Also in this case, if the threshold voltage of a non-selected memory cell whose gate is applied with 5V, is 3V, it is not possible to make an on-current sufficiently large. For instance, in a NAND basic block designed on the basis of a 1 μm rule, a cell current only in the order of several μA flows during data reading, which is not suitable from the standpoint of increased speed.

A second problem of a conventional memory is the necessity of high voltage withstanding. During data writing into the memory cell 32 for example, the threshold voltage of the memory cells 33 to 39 is about 5V so that a high voltage of 20V becomes necessary to efficiently write data in the memory cell 32. For this reason, a sufficiently high voltage withstand is required for peripheral circuits, while posing another problem of lowering the reliability due to voltage stress applied to memory cells.

SUMMARY OF THE INVENTION

The present invention has been made in consideration of the above circumstance, and has as its object to provide a non-volatile semiconductor memory which has a high operation speed, can collectively and uniformly erase all memory cells reliably, and allows the use a low voltage during data writing.

Each memory cell is constructed of a parallel connection of a floating gate transistor and an enhancement type transistor. The threshold voltage of a floating gate transistor during an erase state, i.e., during a state wherein the floating gate traps or charges negative charges, is not lower than the threshold voltage of the enhancement type transistor. As a result, the threshold voltage of each memory cell during an erase state can be determined by the enhancement type transistor, and during the write state by the floating gate transistor.

Accordingly, even during the erase state, the cell current of a memory cell can take a large value because the threshold voltage of the enhancement type transistor is made low. Even if a non-selected memory cell within a basic block is in the erase state, the current flowing through the memory cell is made large, to thereby realize a high operation speed.

In addition, the threshold voltage during the erase state takes the threshold voltage of the enhancement type transistor, i.e., a predetermined constant threshold voltage, to thereby realize a uniform erase for all memory cells.

Furthermore, since the threshold voltage of a memory cell in the erase state is low, it is possible to turn on the memory cell at a low voltage. Accordingly, since a non-selected memory can turn on at a low voltage even in the erase state, data can be written in a selected memory cell.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a plan view showing a pattern according to the background art;

FIG. 1B is a cross section along line A--A' of FIG. 1A;

FIG. 1C is a cross section along line B--B' of FIG. 1A;

FIG. 2 is an equivalent circuit for FIG. 1A;

FIGS. 3A and 3B are views illustrating the erase/write operation of a floating gate transistor;

FIG. 4 shows the characteristic curves of the threshold voltage of a floating gate transistor in an erase state and in a write state;

FIG. 5A is a plan view of a pattern showing a first embodiment according to the present invention;

FIG. 5B is a cross section along line A--A' of FIG. A;

FIG. 6 is an equivalent circuit for FIG. 5A;

FIG. 7 shows the characteristic curves of the threshold voltage for FIG. 5A;

FIG. 8 is a plan view showing a second embodiment according to the present invention;

FIG. 9 is an equivalent circuit for FIG. 8;

FIG. 10A is a plan view of a pattern showing a third embodiment according to the present invention;

FIG. 10B is a cross section along line A--A' of FIG. 10A;

FIG. 11 is an equivalent circuit for FIG. 10A;

FIG. 12 is a plan view of a pattern showing a fourth embodiment according to the present invention;

FIG. 13A is a diagram illustrating a cell current for FIG. 5A;

FIG. 13B is a diagram illustrating a cell current for FIG. 12;

FIG. 14 shows the fourth embodiment modified from the fourth embodiment;

FIG. 15A is a plan view of a pattern showing a sixth embodiment according to the present invention;

FIG. 15B is a cross section along line A--A' of FIG. 15A;

FIG. 16A is a plan view of a pattern showing a seventh embodiment according to the present invention;

FIG. 17A is a plan view of a pattern showing an eighth embodiment according to the present invention;

FIGS. 16B and 17B are cross sections along line A--A' respectively of FIGS. 16A and 17B;

FIGS. 18 and 19 are cross sections showing a ninth embodiment;

FIGS. 20A to 20D and FIGS. 21A to 21D are cross sections showing manufacturing steps of the ninth embodiment;

FIG. 22 is a plan view of a pattern showing a tenth embodiment;

FIG. 23 is a cross section along line a--a' of FIG. 22;

FIG. 24 is a cross section along line b--b' of FIG. 22;

FIGS. 25A to 25G are cross sections showing manufacturing steps of a first manufacturing method of the tenth embodiment; and

FIGS. 26A to 31C are cross sections showing manufacturing steps of a second manufacturing method of the tenth embodiment.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

FIGS. 5A and 5B show the memory array of a NAND type EEPROM embodying the present invention, wherein FIG. 5A is a plan view of the pattern, and FIG. 5B is a cross section along line A--A' of FIG. 5A. In FIGS. 5A and 5B, similar constitutional elements to those shown in FIGS. 1A to 5B are represented by using identical reference numerals shown in FIGS. 1A to 1C. The device shown in FIGS. 5A and 5B is applied with the same voltages shown in Table 1 (although a write voltage value is small and an erase voltage value is large) to perform erase, write and read operations.

The different point of the embodiment shown in FIGS. 5A and 5B from the memory cell shown in FIGS. 1A to 1C is that, as understood from FIG. 5A in particular, each floating gate 16 is displaced left in the extending direction of a control gate 17. With such displacement arrangement, each floating gate 16 covers not all the area of each memory cell (32 to 39) but a partial area thereof. Consider the channel region of a memory cell (39) for example. At the partial area of the channel region, the floating gate 16 overlaps the control gate 17 to form a floating gate transistor (39a), whereas at the remaining area, only the control gate 17 is present to form an enhancement type transistor (39b). Each memory cell is therefore constructed of a parallel connection of the above-described two types of transistors. The equivalent circuit of each NAND basic block 10 shown in FIG. 5A is therefore represented as shown in FIG. 6.

Next, the operation of eight memory cells 32 to 39 each constructed of a parallel connection of the floating gate transistor and enhancement type transistor as shown in FIG. 6, will be described with reference to the characteristic curves shown in FIG. 7. The curve (b) shown in FIG. 7 indicates the characteristic of a memory cell in an erase state. In the erase state, the threshold voltage of a floating transistor, e.g., transistor 32a shown in FIG. 6, is as high as about 5V as shown by the curve (a) in FIG. 7. However, the threshold voltage of the enhancement type transistor 32b connected in parallel with the transistor 32a is 1V as seen from the curve (b). As a result, the characteristic of the enhancement type transistor 32b becomes dominant as the characteristic of the memory cell 32, thus presenting the threshold voltage of 1V. Similarly, as the characteristics of the other memory cells 33 to 39, the enhancement type transistors 33b to 39b become dominant.

The curve (c) shown in FIG. 7 represents the characteristic of a memory cell in a write state. In this case the threshold voltage becomes about -5V. Namely, although the threshold voltage of an enhancement type transistor (e.g., 32b) in the write state remains 1V which is the same as the case of the erase state, the threshold voltage of a floating gate transistor (e.g., 32a) becomes about -5V. As a result, the characteristic of a floating gate transistor becomes dominant as the characteristic of the memory cell, thereby presenting the threshold voltage of about -5V.

In a memory cell constructed of a parallel connection of such two transistors, the threshold voltage in the erase state is determined by the enhancement type transistor. It is easy to design and manufacture enhancement type transistors having a threshold voltage of 1V. In addition, the threshold voltage of floating gate transistors may take any value larger than or equal to 1V (at least larger than or equal to 0V), so that if data are erased sufficiently while considering threshold voltage variation, a large cell current can flow to thereby realize a stable characteristic.

The erase, write and read operations of the NAND basic block is the same as that described with Table 1. It is necessary for a conventional memory to set the threshold voltage within the range from 1V to 3V in the erase state. Therefore, too high a voltage cannot be applied to the word line. For this reason, a relatively low voltage 15V is applied to slowly erase data and carefully move to a desired threshold voltage. In contrast, in the memory of this embodiment, the threshold voltage in the erase state is determined by the enhancement type transistor so that it is not necessary to consider to what degree the threshold voltage of the floating gate transistor moves in the erase state. A voltage higher than conventional, e.g. in the order of 17V can therefore be applied to the word line to sufficiently erase data.

Furthermore, in writing data in a conventional memory, the threshold voltage of an erased memory cell rises to about 5V so that it is necessary to apply a high voltage 20V to the control gate of a non-selected memory cell in order to apply 15V to the drain of a selected memory cell. In contrast, in the case of this embodiment, the threshold voltage in the erase state is as low as 1V, or about 2V if the substrate effect is considered, so that a voltage about 17V lower than conventionally applied, can be applied to the control gate of a non-selected memory cell in order to obtain a voltage 15V as conventionally obtained at the drain of a selected memory cell.

FIG. 8 is a plan view of the pattern showing the second embodiment of the memory array according to the present invention. The size, in the lateral direction in FIG. 1C, of each memory cell according to the related background art is determined by the pitch between floating gates. In the case of the embodiment memory shown in FIG. 5A, the size is determined by the pitch between drain regions 14 formed with the contact 21. The size in the lateral direction of the embodiment memory shown in FIG. 5A becomes smaller than that of the memory shown in FIG. 1C according to the related background art. However, the size of the memory shown in FIG. 5A is determined by the contact 21 so that it is not possible to make the size sufficiently small.

In view of this, the embodiment shown in FIG. 8 aims at making the size in the lateral direction smaller. Specifically, instead of the select gate 19 shown in FIG. 5A, two select gates 26 and 27 are provided as shown in FIG. 8. The right and left, two NAND basic blocks are connected in common to a single data line (not shown) via a single contact 21. In the two NAND basic blocks, the region 28a of the select gate 26 and the region 28b of the select gate 27 are formed, for example, by depletion type transistors or n⁺ type buried regions, and the regions 28a and 28b are made always on-state. The regions 29a and 29b are formed as enhancement type transistors.

With the above arrangement, the right and left, two NAND basic blocks can commonly use the single contact 21. As a result, the distance, in the lateral direction in FIG. 8, between basic blocks is determined by the distance between n⁺ diffusion layers (source or drain region 15) of a memory cell. The distance can be made smaller than that of the memory shown in FIG. 5A.

FIG. 9 is an equivalent circuit of the two NAND basic blocks in the memory array shown in FIG. 8. In FIG. 9, reference numerals 61 and 62 represent enhancement type transistors constructed of the regions 29a and 29b of the select gates 27 and 26. The transistors 51 and 62 are controlled by select gate signals SG4 and SG3, respectively. In FIG. 9, reference numerals 52 to 59 represent memory cells, 52F to 59F floating gate transistors, and 52E to 59E enhancement type transistors.

FIGS. 10A and 10B show the structure of the memory array according to the third embodiment of this invention. FIG. 10A is a plan view of the pattern, and FIG. 10B is a cross section along line A--A' of FIG. 10A. The different point of the embodiment shown in FIG. 10A from the embodiment shown in FIG. 8 is that an erase gate 72 is provided as seen particularly from FIG. 10B. Namely, as seen from FIGS. 10A and 10B, above a floating gate 16 made of a first polysilicon layer, there is formed the erase gate 72 made of a second polysilicon layer with an erase gate oxide film 71 interposed therebetween. There is further formed a control gate 17 made of a third polysilicon layer on the gate 72 with a gate insulating film 73 interposed therebetween.

The equivalent circuit of two NAND basic blocks of the memory array constructed as above is shown in FIG. 11. The different point of FIG. 11 from FIG. 9 is that the erase gate 72 is positioned between the floating gate 16 and the control gate 17. These erase gates 72 are connected to erase gate lines EGL1 and EGL2 via which erase gate line signals EG1 and EG2 are applied.

In the memory constructed as above, data are erased by setting WL1 to WL8 all to 0V, and EG1 (or EG2) to 20V. Electrons as Fowler-Nordheim's tunnel current are therefore emitted from the floating gates 16 of the memory cells 52 to 59 connected to the gate line EGL1 (or EGL2), to the erase gate 72 to thereby erase data.

Writing data is performed in the following manner. It is assumed that a selected word line is WL1 for example. The word line WL1 is set to 12V, data line DL to 10V, select gate signals SG1, SG3 and SG4 to 20V, and non-selected word lines WL2 to WL8 to 20V. Electrons are therefore injected into the memory cell 52 by means of the hot electron effect, to thereby write data. In writing data into the memory cell 53, word line WL2 is set to 12V while setting other word lines WL1, WL3 to WL8 to 20V. In a similar manner, up to the memory cell 59 data can be sequentially written. The reason why the voltage of the non-selected word line is set as high as 20V, is that each memory cell is caused to operate as a triode to suppress the generation of hot electrons and hence prevent writing erroneous data.

In the embodiment shown in FIG. 10A, electron emission from the floating gate 16 is carried out not to the substrate but to the erase gate 72. As a result, it is possible to make the gate oxide film 22 formed between the floating gate 16 and the substrate 11 thick, e.g., in the order of 300 Å. The reliability of the gate oxide film 22 is thereby improved to the degree that high reliability similar to an ultraviolet ray erasure type EPROM can be obtained.

FIG. 12 is a plan view of the pattern according to the fourth embodiment of this invention. In FIG. 12, similar constitutional elements to those shown in FIG. 5A are represented by identical reference numerals. The different point of the embodiment shown in FIG. 12 from that shown in FIG. 5A is that each floating gate 16 is displaced right or left (in the extension direction of control gate 17) to be disposed in a so-called staggered arrangement. Namely, the positions of the floating gates 16 are alternately displaced for each word line and for each data line. With this arrangement, a large margin of displacement in mask alignment during manufacturing processes can be obtained. This will be explained while comparing with the case where the positions of the floating gates 16 are not displaced right or left as shown in FIG. 5A. In FIG. 5A, all the floating gates 16 are displaced left as viewed in FIG. 5A from the state shown in FIG. 1A. Cells shown in FIG. 5A have a smaller margin of displacement in mask alignment during manufacturing processes. For example, it is assumed that the floating gates 16 shown in FIG. 5A are displaced right because of mask displacement at the time of forming the floating gates 16 during the manufacturing processes. In reading data from a cell of the NAND structure, a selected word line is set to 0V, and the other word lines are set, e.g., to 5V, as seen from Table 1. In such a case, if "0" has been written in the memory cell connected to the selected word line, this memory cell becomes the on-state due to the threshold voltage of -5V so that current flows through the cell group of the NAND structure. If "1" has been written in the selected memory cell, this memory cell becomes the off-state due to its threshold voltage of 5V so that current will not flow. That the on-current becomes minimum, i.e., the speed becomes worst, is caused when only the selected cell has the data "0" and the other seven cells have data "1". Specifically, in the equivalent circuit shown in FIG. 6, assuming that WL1 is being selected, the on-current is determined by the characteristics of the enhancement type transistors 33b to 39b. This is because the transistor 32a in the on-state has a threshold voltage sufficiently negative so that it allows a sufficient current to flow as compared to the transistors 33b to 39b. Accordingly, assuming that the floating gates 16 displace to the right due to mask displacement, the enhancement type transistors 32b to 39b all allow a small current to flow as shown in FIG. 13A. If a memory is formed in such a manufacturing condition, the speed is lowered and in some cases the manufactured memory becomes a faulty one.

In contrast, according to the embodiment shown in FIG. 12, there is a large margin of such mask displacement. Specifically, assuming that the floating gates of the cells shown in FIG. 12 are displaced right as above, the equivalent circuit thereof is as shown in FIG. 13B. For a certain data line, the current values of the enhancement type transistors become small and large alternately for each word line, so that four cells of the eight NAND cells have a large current and the remaining four cells have a small current. The total current becomes an average current thereof. In other words, even with mask displacement, the current value does not become too small.

In the fourth embodiment, the floating gates are displaced alternately for each word line. It is not necessary to use such an arrangement by all means. For example, as seen from the fifth embodiment shown in FIG. 14, the displacement direction of the floating gate may be changed collectively for word lines WL1 to WL4 and word lines WL5 to WL8. By collectively displacing as above, the manufacturing technique becomes simple. It is also unnecessary that the same number of floating gates be displaced for each direction.

FIGS. 15A and 15B show the sixth embodiment of this invention. FIG. 15A is a plan view of the pattern, and FIG. 15B is a cross section along line A--A' of FIG. 15A. The different point of the memory of this embodiment from that shown in FIGS. 5A and 5B is that each floating gate 16 is positioned generally at the center of the channel region of each memory cell in the widthwise direction. In the memory of this embodiment, the channel width of the floating gate transistor of each memory cell is determined by a length F indicated in FIG. 15B, and the channel width of the enhancement type transistor is determined by a length (E1+E2). Even if the floating gates 16 are displaced in the right/left direction as viewed is FIG. 15B due to an occurrence of mask displacement in the right/left direction at the time of forming the floating gates 16, the length F and length (E1+E2) are maintained constant.

It is unnecessary to make uniform the thickness of the gate oxide film 22 between the semiconductor substrate 11 and the floating gate 16. As shown in FIG. 16B (seventh embodiment) and FIG. 17B (eighth embodiment), the upper position of the channel may be made thicker (t2), and only the tunnel portions 42 and 43 for passing tunnel current may be made partially thinner (t1, where t1<t2).

More specifically, as understood from FIG. 16B which is a cross section along line A--A' of FIG. 16A, and from FIG. 17B which is a cross section along line A--A' of FIG. 17A, the tunnel portions 42 and 43 are formed at the upper left corners of the floating gates 16 displaced right as viewed in the figures.

More specifically, the tunnel portion 42 shown in FIGS. 16A and 16B is formed in the following manner. Namely, the oxide film 22 on the substrate 11 is first removed using an opening 44 as a mask. Next, using the opening as a mask, ions such as N⁺ are injected so that a diffusion region 15a is formed on the substrate 11 under the opening 44. This region 15a is integrally connected to the source/drain region 15 to be formed thereafter. Then, an oxide film 22a is thinly formed (t1) on the substrate 11. This oxide film 22a becomes in unison with the originally formed oxide film. Thereafter, there are formed on the oxide films 22 and 22a, the floating gate 16, oxide film 23, and control gate 17.

The tunnel portion 43 shown in FIGS. 17A and 17B is formed in substantially the same manner as in FIGS. 16A and 16B. In this case, in forming the tunnel portion 43, ion injection is performed through an opening 45, and the oxide film 22a is formed through an opening 46.

FIGS. 18 and 19 are cross sections of the ninth embodiment. FIG. 18 corresponds to FIG. 5B. FIG. 19 corresponds to a cross section along line B--B' of FIG. 5A. The eighth embodiment shows the case where a silicon nitride film 47 is formed between the floating gate 16 and the control gate 17 of the first embodiment shown in FIGS. 5A and 5B.

The method of manufacturing a memory having the cross sections shown in FIGS. 18 and 19, will be described with reference to FIGS. 20A to 20D and FIGS. 21A to 21D. FIGS. 20A to 20D correspond to FIG. 18, and FIGS. 21A to 21D correspond to FIG. 19.

First, as seen from FIGS. 20A and 21A, after forming an element separation insulating film 2 on a p-type Si substrate 1, there is formed a first gate insulating film 3₁ made of 300 to 400 Å thermal oxide film (FIG. 21A). The portion of the first gate insulating film 3₁ corresponding to the channel region of a memory cell, is removed with hydrofluoric acid solution or by means of a reactive ion etching, and thereafter there is formed at this portion a second gate insulating film 3₂ made of 50 to 200 Å thermal oxide film. Next, a first polycrystalline silicon film 4 of 500 to 4000 Å for forming the floating gate is deposited over the whole surface. On this first polycrystalline silicon film 4, there is formed a third gate insulating film 3₃ of 80 to 200 Å made of a thermal oxide film, and thereafter a silicon nitride film 5 of 80 to 200 Å is deposited by means of CVD.

Next, as seen from FIGS. 20B and 21B, the nitride film 5, third gate insulating film 3₃, and first polycrystalline silicon film 4 are selectively etched by means of reactive ion etching, to thereby form a slit separating floating gates between adjoining NAND cells. This slit is patterned so that it partially overlaps the element region and partially exposes an area above the channel region. At this stage, the first polycrystalline silicon film 4 is not yet separated between memory cells M₁ to M₄.

Thereafter, there is formed above the channel region a fourth gate insulating film 3₄ of 300 to 400 Å by means of thermal oxidation (FIGS. 20C and 21C). At this time, the surface of the nitride film 5 above the first polycrystalline silicon film 4 is oxidized, to thereby form a high voltage withstand interlayer insulating film of a three-layered structure made of oxide film, nitride film and oxide film. Since the oxidation speed on the nitride film 5 is slow, the thickness of the insulating film on the first polycrystalline silicon film 4 will not become unnecessarily thick. This is significant in that the capacitance ratio between gates are set at optimum values and the write characteristics is not deteriorated.

Next, there is deposited a second polycrystalline silicon film 6 of 1000 to 4000 Å for forming control gates (FIGS. 20C and 21C1). Next, cell control gates 6₁ to 6₄ and cell select gates 6₅ and 6₆ are formed by means of reactive ion etching (patterning) while using as a mask a resist R pattern. At this time, by using the same mask, patterning is carried out to the depth of the first polycrystalline silicon film 4 to thereby form floating gates 4₁ to 4₄ separately.

Thereafter, by using these gate electrodes as a mask, ions are injected to form an n-type layer 7 which is a source/drain diffusion layer (FIG. 21C2).

Next, the whole surface is covered with a CVD insulating film 8 to then open contact holes in the drain regions. Ions are again injected through the contact holes to form an n⁺ type layer 9 (FIGS. 20D and 21D). Lastly, wirings such as bit lines are formed by means of A1 vapor deposition and patterning, to thereby obtain a finished memory.

FIG. 22 shows the tenth embodiment of this invention. FIG. 22 shows, in contrast with FIG. 15A, only the cell portion of the right and left, two NAND basic blocks 10. The cross section along line a--a' of FIG. 22 is shown in FIG. 23, and the cross section along Line b--b' is shown in FIG. 24. As seen from FIG. 24, the structure shown in the cross section along line b--b' is the same as FIG. 15A. The structure shown in the cross section along line a--a', however, is different from FIG. 15A as seen from FIG. 23. Namely, the NAND basic blocks 10 and 10 are separated not by the field oxide film but by an enhancement type MOS transistor (separation transistor) 64 extending in the up/down direction as viewed in FIG. 22. That is, a field oxide film is not necessary. This separation transistor 64 is constructed by forming a gate electrode 66 on the semiconductor substrate (p type) 11 with a gate oxide film 65 interposed therebetween. The gate electrode 66 is set to the potential same as the substrate 11 in an ordinary use state to separate the blocks 10 and 10. The floating gate 16 is formed, similar to the case shown in FIG. 15A, at the position covering only the central portion of the channel (E3+F3+E3) with a thin gate oxide film interposed therebetween. Namely, the portion having the width F3 of the whole channel width (E3+F3+E3) is covered with the floating gate 16, to thus form a floating gate transistor having a channel width F3. The floating gate 16 and the gate electrode are formed at the same time using the same mask. Therefore, the relative distance between the floating gate 16 and the gate electrode 66 is constant. In other words, there occurs no mask displacement between the gates 16 and 66. It is not necessary, accordingly, to prepare some margin in the right/left direction as viewed in FIGS. 22 and 23. In addition, it is not necessary to form a field oxide film as described above, to therefore make the overall size of the memory small.

Next, the method of manufacturing the memory shown in FIGS. 22 to 24 will be described with reference to FIGS. 25A to 25G.

Referring to FIG. 25A, a gate insulating film 82 for the separation transistor is grown on a semiconductor substrate 81 by thermal oxidation. Next, a resist 83 is deposited on the film 82 in order to form a thin oxide film 83 under the floating gate.

Next, the insulating film 82a adore the region where the floating gate transistor is to be formed, is removed by using the resist 83 as a mask. This is shown in FIG. 25B.

Next, there is formed an oxide film 83 about 100 A serving as the floating gate oxide film (FIG. 25C).

Next, a polysilicon 84 is deposited in order to form the separation transistor gate and the floating gate. A resist 85 is applied on the polysilicon 84, the resist being patterned in the form of the separation transistor gate and the floating gate.

The polysilicon 84 and the insulating film 82 are etched using the resist 85 as a mask. After etching, the resist is removed (FIG. 25E).

Thereafter, an oxide film 86 is formed through oxidation (FIG. 25F).

Next, there is deposited on the film 86 a polysilicon serving as the control gate (FIG. 25G). The polysilicon 87 is subjected to PEP (Photo Etching Process) to form a predetermined pattern by using a resist (FIG. 25G). Thereafter, N⁺ regions serving as the memory cell sources/drains are formed through ion implantation or the like by using as a mask the control gate and the separation transistor.

With the above method, the distance between the floating gate and the separation transistor gate 66 shown in FIG. 22 can be determined without any error. In other words, self alignment can be achieved in the right/left direction as viewed in FIG. 22.

The method of manufacturing the memory shown in FIGS. 22 to 24 without displacement not only in the right/left direction but also in the up/down direction respectively as viewed in FIG. 22, will be described with reference to FIGS. 26A to 31C.

FIGS. 26A and 26B according to this method correspond to FIG. 25 of the above-described method. The cross section along line a--a' of FIG. 26A is shown in FIG. 26B. This method is the same as the above-described method with respect to FIGS. 26A and 26B.

Next, as seen from FIG. 27A and FIG. 27B showing the cross section along a--a' of FIG. 27A, a polysilicon 84 is deposited on the films 82 and 83 shown in FIG. 26A and 26B. A resist 85 is applied on the polysilicon 84. The resist 85 is patterned in a stripe shape to form resists 85a and 85b. As seen from FIGS. 27A and 23, the resist 85a is arranged to have the width F3 of the floating gate 16, and the resist 85b is arranged to have the width I1 of the separation transistor gate 66.

Next, as seen from FIG. 28A and FIG. 28B showing the cross section along line a--a' of FIG. 28A, the polysilicon 84 and the films 82 and 83 are etched using the resists 85a and 85b as a mask. Thereafter, the polysilicon 84 and the substrate 11 are oxidized to form an oxide film 86. There is formed on this film 86 a polysilicon 87 in order to form the control gate.

Next, as seen from FIG. 29A and its cross section along a--a' (FIG. 29B) and its cross section along line b--b' (FIG. 29C), the polysilicon 87 is oxidized to form an oxide film 91. A resist 92 is applied on the film 91. As particularly shown in FIG. 29A, the resist 92 is arranged to have a width W at the region where the control gate 16 (refer to FIG. 22) is to be formed.

Next, oxide film 91, polysilicon 87 and oxide film 86 are etched using the resist 92 as a mask.

The condition after this etching is shown in the cross section (FIG. 30B) along line a--a' of FIG. 30A and in the cross section (FIG. 30C) along line b--b' of FIG. 30A. FIG. 30B corresponds to FIG. 29B, and FIG. 30C corresponds to FIG. 29C. As seen from FIGS. 30B and 29B, the portion under the resist 92 is not etched. However, as seen from FIGS. 30C and 29C, the portion not covered with the resist 92 is etched to thereby expose the substrate 81 and the polysilicon 84.

Next, as seen from FIGS. 31A and its cross section along line a--a' (FIG. 31B) and its cross section along line b--b' (FIG. 31C), the resist 92 is removed. Next, another resist 93 is applied on the surface and patterned to leave the resist 93 only above the region where the separation transistor is to be formed. Next, etching is performed using the resist 93 and oxide film 91 as a mask. As a result, the polysilicon 84 shown at the center of FIG. 30A is removed at the portion extending outside of the oxide film 91, and remained as the floating gate 16 at the portion under the oxide film 91.

Next, the resist 93 is removed, and N⁺ regions (refer to FIG. 24) serving as the memory cell source/drain regions 15 are formed through ion implantation or the like by using as a mask the control gate 87 (17) and separation transistor gate 84 (66). The succeeding processes are similar to the conventional processes.

As described above, according to the manufacturing method illustrated in FIGS. 26A to 31C, it is possible to form the floating gate 16 and enhancement type transistor of a memory cell by means of self alignment, thereby preventing the variation of characteristics to be caused by mask displacement. In addition, since the separation transistor 64 is used, it is not necessary to use a field oxide film. As a result, a memory cell can be formed at the pitch of polysilicon, to thereby make the cell size smaller when compared with the method which uses a field region for separation.

In the above embodiments, the operation has been described with the definition that electrons are injected into the floating gate for the erase operation, and electrons withdrawn therefrom for the write operation. However, the operation may be described with the opposite definition that electrons are injected into the floating gate for the write operation, and electrons are withdrawn therefrom for the erase operation. Furthermore, although all memory cells are collectively erased in the above embodiments, they may be erased for each word line by selectively applying a voltage to a word line during the erase operation. The invention is not limited to the above embodiments, but various modifications may be possible which do not contradict the gist of this invention. For example, although the memory size becomes large to some degree, an independent E type transistor is provided in parallel with a conventional floating gate transistor, with the arrangement that the control gate is used commonly and the channel portion is separately formed. Furthermore, although a floating type non-volatile memory has been described, the gist of the present invention is not limited thereto, but a memory cell of a so-called MNOS (Metal-Nitride-Oxide-Semiconductor) type where electric charges are charged at the trap level is also included in this invention. 

We claim:
 1. A method of manufacturing a NAND type non-volatile semiconductor memory, comprising the steps of:forming an element separation insulating film on a silicon substrate to separate two NAND type memories arranged in a longitudinal direction and two NAND type memories arranged in a lateral direction from one another; forming a first gate insulating film on a surface of the silicon substrate to form a channel region on a part of the silicon substrate that is located directly beneath the surface of the silicon substrate on which the first gate insulating film is formed; depositing a first silicon film on at least the first gate insulating film; etching the first silicon film and the first gate insulating film to form first slits extending in the longitudinal direction to separate the NAND type memories arranged in the lateral direction from one another, a part of the channel region of each memory cell of each NAND type memory being exposed by each of the first slits, one part of the channel region being bisected by a line extending along the longitudinal direction thereof to expose one part of the channel region and to cover the other part of the channel region with the first gate insulating film and the first silicon film; covering the exposed part of the channel region and the first silicon film both with a second gate insulating film; depositing a second silicon film on the second gate insulating film; etching the surface of the silicon substrate to form second slits extending in the lateral direction thereof for separating the memory cells of each NAND type memory, a control gate extending in the lateral direction being formed from the second silicon film and further a floating gate being formed from the first silicon film by the second slits; and implanting ions by using the control gate and the floating gate as a mask, to form source and drain diffusion regions on the surface of the silicon substrate.
 2. The method of manufacturing a NAND type non-volatile semiconductor memory of claim 1, further comprising the step of:depositing an insulating film, a nitride film and the second gate insulating film between the step of depositing the first silicon film and the step of etching the first silicon film and the first gate insulating film to form a three-layered structure interlayer insulating film. 